We would like to express our appreciation to the Valencian Agency of Innovation (AVI) for their valuable funding and support in the development of the GENIUS project. Thanks to their contribution, we have achieved important advances in electro-optical modulator technology.
We have successfully completed the fabrication of 10 wafers, of which 6 have reached the final stage of the process. The remaining wafers were used for destructive testing and to refine certain steps of the fabrication process. The integration of additional materials into the photonic platform has required the development of specific fab modules, that have required two additional months of back-end processing.
Atomic Force Microscopy (AFM) techniques were used to measure the surface roughness and associated losses. In addition, photolithography of the motifs was performed and the metal contacts necessary to inject the electrical modulation signals were deposited.